发明名称 Apparatus and method for fabricating functional film
摘要 A functional film fabrication method for fabricating a functional film on a base having a flat surface includes an installation step and an application step. In the installation step, a base is installed so that the flat surface is on top, and a droplet discharge head with a plurality of nozzles aligned in a first direction is arranged above the flat surface. In the application step, a functional film is fabricated on the flat surface by repeating a discharge step and a nozzle movement step. In the discharge step, droplets of a functional liquid are discharged from the nozzles onto the base. In the nozzle movement step, the nozzles are moved relative to the base in a second direction perpendicular to the first direction over a distance shorter than the distance between the nozzles in the first direction.
申请公布号 US7459176(B2) 申请公布日期 2008.12.02
申请号 US20040796276 申请日期 2004.03.10
申请人 SEIKO EPSON CORPORATION 发明人 SAKURADA KAZUAKI
分类号 B05D5/12;G02F1/13;B05D1/26;B05D7/00;G02B5/20;G02F1/1333;G02F1/1335;G02F1/167;G09F9/00;H01J9/02;H01L27/32;H01L51/40;H01L51/50;H01L51/56;H05B33/10 主分类号 B05D5/12
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