发明名称 Apparatuses and methods for cleaning test probes
摘要 Apparatuses and methods for cleaning test probes used in a semiconductor testing machine of the type having a plurality of test probes configured to contact the surface of a semiconductor wafer to test one or more dies formed thereon. In one embodiment, the apparatus includes a roller-support arm and a cylindrical roller supported by the roller-support arm. The roller has an outer surface comprising a sticky material. Debris on the probes will adhere to the sticky material as roller is rolled across tips of the probes. The probes are thereby cleaned.
申请公布号 US7458123(B2) 申请公布日期 2008.12.02
申请号 US20070742960 申请日期 2007.05.01
申请人 发明人
分类号 B08B11/00;G01R1/06;G01R31/02 主分类号 B08B11/00
代理机构 代理人
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