| 摘要 |
<p>The invention relates to an apparatus for producing a plasma jet, having at least one discharge tube through which a process gas flows. According to the invention, electrically conductive discharge protection is provided on at least one discharge tube. The advantages of the invention are, in particular, that parasitic discharges are suppressed, and the thermal loads on the individual components of the apparatus and of the substrate are reduced. ® KIPO & WIPO 2009</p> |
