发明名称 Flip-chip semiconductor device manufacturing method
摘要 The objective of the invention is to provide a semiconductor device manufacturing method that can suppress the formation of voids in the underfill resin and realize a highly reliable flip-chip assembly. The semiconductor device manufacturing method pertaining to the present invention comprises the following processing steps: a step of operation in which a plurality of electrodes 24, formed in a two-dimensional array on a principal surface 22 of semiconductor chip 20, are connected to corresponding conductive regions 32, 34 on substrate 30, a step of operation in which underfill resin 40 is supplied between the principal surface of the semiconductor chip and the substrate, and a step of operation in which the semiconductor chip and substrate with supplied underfill resin 40 are exposed to atmospheric pressure.
申请公布号 US7459339(B2) 申请公布日期 2008.12.02
申请号 US20060538626 申请日期 2006.10.04
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 MASUMOTO MUTSUMI
分类号 H01L21/44;H01L21/48;H01L21/50 主分类号 H01L21/44
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