| 发明名称 |
MEMS passivation with transition metals |
| 摘要 |
Organic surfactants are employed to passivate the surfaces of MEMS devices, such as digital micromirrors. The binding of these surfactants to the surface is improved by first associating with the surface transition metal atoms or ions from Groups IVB, VB, and IVB of the periodic table.
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| 申请公布号 |
US7459325(B2) |
申请公布日期 |
2008.12.02 |
| 申请号 |
US20050029985 |
申请日期 |
2005.01.05 |
| 申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
JACOBS SIMON JOSHUA;MILLER SETH ADRIAN |
| 分类号 |
H01L21/00;B81B3/00;B81C1/00;H01L27/14;H01L29/08;H01L35/24;H01L51/00 |
主分类号 |
H01L21/00 |
| 代理机构 |
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