NANO STRUCTURE COMPRISING ORGANIC MONOLAYER AND BLOCK COPOLYMER AND METHOD THEREOF

摘要

A nanostructure including an organic single molecule layer and a block copolymer and a manufacturing method thereof is provide to provide a nanostructure including the block copolymer nano structure on various kinds of oxide substrates and to utilize easily the nanostructure by using the many shape of nano structures. An oxide substrate is formed. A block copolymer thin film is formed at an oxide surface. The self-assembly nanostructure is formed by heat-treating a block copolymer. The oxide substrate manufacturing method is formed by using a deposition method, a monocrystal formation method, a solid phase method and a sol-gel method.