METHOD TO REDUCE ADHESION BETWEEN A CONFORMABLE REGION AND A PATTERN OF A MOLD

摘要

THE PRESENT INVENTION PROVIDES A METHOD TO REEDUCE ADHESION BETWEEN A CONFORMABLE REGION ON A SUBSTRATE AND A PATTERN OF A MOLD, WHICH SELECTIVELY COMES INTO CONTACT WITH THE CONFORMABLE REGION. THE METHOD FEATURES FORMING A CONFORMABLE MATERIAL ON THE SUBSTRATE AND CONTACTING THE CONFORMABLE MATERIAL WITH THE SURFACE. A CONDITIONED LAYER IS FORMED FROM THE CONFORMABLE MATERIAL. THE CONDITIONED LAYER HAS FIRST AND SECOND SUB-PORTIONS,WITH THE FIRST SUB-PORTION BEING SOLIDIFIED AND THE SECOND SUB-PORTION HAVING A FIRST AFFINITY FOR THE SURFACE AND A SECOND AFFINITY FOR THE FIRST SUB-PORTION.THE FIRST AFFINITY IS GREATER THAN THE SECOND AFFINITY. IN THIS FASHION, UPON SEPARATION OF THE MOLD FROM THE CONDITIONED LAYER, A SUBSET OF THE SECOND SUB-PORTION MAINTAINS CONTACT WITH THE MOLD,THEREBY REDUCING THE PROBABILITY THAT A PATTERN FORMED IN THE CONDITIONED LAYER BECOMES COMPROMISED.