| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an image sensor adopting a microlens utilizing an oxide film. SOLUTION: The manufacturing method of an image sensor includes: a step for forming an interlayer insulating layer on a substrate including a photodiode; a step for forming a color filter layer on the interlayer insulating layer; a step for forming the oxide film on the color filter layer; a step for forming a plurality of microlens patterns having a prescribed interval on the oxide film; a step for forming an oxide film microlens having a prescribed curvature by etching the oxide film with the microlens pattern as a mask; and a step for cleaning the microlens pattern with a peroxosulfuric acid solution. COPYRIGHT: (C)2009,JPO&INPIT
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