FILM QUALITY EVALUATING DEVICE, AND VACUUM PROCESSING APPARATUS USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a film quality evaluating device which can measure mix proportions of particles having different deposition probabilities on a real-time basis, for example, in association with film forming operation. SOLUTION: The film quality evaluating device includes first and second film forming rate measuring units 45 and 47 for measuring a deposition amount of particles which come in through first and second inlets 55 and 67 and accumulates on first or second quartz vibrators 51 and 67 respectively, and a filter 53 mounted so as cover the first inlet 55 of the first film forming rate measuring unit 45 for catching some of particles passing through the first inlet 55 to be deposited thereon. COPYRIGHT: (C)2009,JPO&INPIT