| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a ceramic thin film which has hardly a crack and a pinhole on the surface thereof and is dense, whose method can be applied when a corrosion-resistant member or the like is manufactured. SOLUTION: The method for manufacturing the ceramic thin film comprises: a gel preparation step (a step S1) of mixing metal salt with a citric acid aqueous solution to prepare an anhydrous citrate complex gel; a solution preparation step (a step S2) of mixing the prepared anhydrous citrate complex gel with an alcoholic solvent to esterify the anhydrous citrate complex gel and prepare an anhydrous citrate complex solution; film formation steps (steps S3-S6) of forming a film on the surface of a base material being an object to be coated by using the prepared anhydrous citrate complex solution. According to this manufacturing method, the ceramic thin film which has high dispersibility of a metal ion, no crack and no pinhole and is dense can be manufactured. For example, a member excellent in processability and manufacturing cost and having high corrosion resistance can be manufactured. COPYRIGHT: (C)2009,JPO&INPIT
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