发明名称 CAPACITOR STRUCTURE IN A SEMICONDUCTOR DEVICE
摘要 A semiconductor device comprises an integrated circuit formed on a substrate with a signal interface and at least one isolator capacitor. The integrated circuit comprises a plurality of interleaved inter-metal dielectric layers and interlayer dielectrics formed on the substrate, a thick passivation layer formed on the plurality of the interleaved inter-metal dielectric layers and interlayer dielectrics, and a thick metal layer formed on the thick passivation layer. The thick passivation layer has a thickness selected to be greater than the isolation thickness whereby testing for defects is eliminated. The one or more isolator capacitors comprise the thick metal layer and a metal layer in the plurality of interleaved inter-metal dielectric layers and interlayer dielectrics separated by the thick passivation layer as an insulator.
申请公布号 US2008290444(A1) 申请公布日期 2008.11.27
申请号 US20070753524 申请日期 2007.05.24
申请人 发明人 CRAWLEY PHILIP JOHN;GHOSHAL SAJOL
分类号 H01L21/20;H01L29/00 主分类号 H01L21/20
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