| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a beam irradiation apparatus that can perform high quality processing. <P>SOLUTION: The beam irradiation apparatus has a laser light source emitting a primary laser beam and a secondary laser beam, a beam cross-section shaping unit that is disposed at a position where the primary and secondary laser beams enter and shapes the cross-section shapes of the primary and secondary laser beams, an image-forming lens disposed at a position where the primary and secondary laser beams exiting from the beam cross-section shaping unit enter, and a stage holding a processing object at a position closer to the image-forming lens than a position where the position of beam cross-section shaping unit is image-formed by the image-forming lens, wherein the laser light source emits the primary and secondary laser beams such that the primary and secondary laser beams form a beam cross-section of long topography at the position of beam cross-section shaping unit and emits those beams so that they intersect each other in a plane orthogonal to the longer direction of the long topography shape. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
