| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface defect inspection method and apparatus capable of detecting a minute surface defect and setting and changing in accordance with the depth of the minute surface defect, a criterion for determining the quality of an object under test. SOLUTION: A surface defect inspection method for receiving, via a light-receiving section, light obtained through reflection of light with which a surface of an object under test has been irradiated, for detecting a surface defect, and for determining the quality of the object under test includes: placing the light-receiving section on a reflected light path predetermined in correspondence with a defect that appears on the surface of the object under test; determining a threshold in advance in accordance with the amount of reflected light and the size of a defect; and determining the quality of the object under test by making a comparison between the amount of reflected light incident on the light-receiving section and the threshold. COPYRIGHT: (C)2009,JPO&INPIT
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