METHOD AND DEVICE FOR MEASURING PARTIAL PRESSURE

摘要

PROBLEM TO BE SOLVED: To provide a method and device for measuring partial pressure capable of simply measuring the distribution of the partial pressure in the vacuum chamber. SOLUTION: The method of measuring partial pressure characteristically includes: the moving step of moving the local plasma source 9 provided in the vacuum chamber dedicated for measurement to the measurement position; and the measurement step of measuring the distribution of the partial pressure in the vacuum chamber by the spectrometric measurement of the luminance intensity of the luminance of received light by receiving the luminance from the plasma generated from the local plasma source through the window through which the light passes, which is provided on the wall of the vacuum chamber. COPYRIGHT: (C)2009,JPO&INPIT