VERFAHREN UND VORRICHTUNG ZUR VAKUUMBEHANDLUNG,申请号DE19996037304T-传众专利搜索

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发明名称	VERFAHREN UND VORRICHTUNG ZUR VAKUUMBEHANDLUNG
摘要
申请公布号	DE69937304(T2)	申请公布日期	2008.11.27
申请号	DE19996037304T	申请日期	1999.06.28
申请人	TOKYO ELECTRON LTD.	发明人	AMANO, HIDEAKI
分类号	H01L21/205;H01L21/302;C23C16/458;H01L21/00;H01L21/3065;H01L21/31;H01L21/683	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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