| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring device dispensing with precedent preparation of data for conversion to many kinds of measuring objects, capable of observing the periphery of a measuring point of the measuring object. SOLUTION: Only reflected light from a focusing position which is different relative to each wavelength component by chromatic aberration is allowed to pass a pinhole 20 of a measuring optical system and detected by a detector 26, and the position of a work 23 surface is measured based on a wavelength component by which a detection output becomes maximum. Meanwhile, in an imaging optical system, reflected light from a work 23 on a different focusing position is imaged by image formation on each pinhole of a pinhole array 28 relative to each wavelength component, and an image of the periphery of the measuring point in the measuring optical system can be observed with deep depth of field. COPYRIGHT: (C)2009,JPO&INPIT
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