HYDROGEN GAS DETECTING MEMBRANE

摘要

PROBLEM TO BE SOLVED: To provide a harmless hydrogen gas detecting membrane by a simple high-repeatability manufacturing method. SOLUTION: The membrane is prepared by sequentially depositing a platinum oxide layer 2 and a catalytic metal layer 3 on a transparent substrate 1, such as quartz glass, by vapor deposition such as the sputtering method. Palladium or platinum is used as the catalytic metal layer. COPYRIGHT: (C)2009,JPO&INPIT