OPTICAL METROLOGY SYSTEM

摘要

The invention relates to a device for positioning an object relative to a reference position, characterised in that it comprises a laser (1) associated with an acoustic-optical modulator (3) for transmitting at least two parallel and modulated phase-opposed laser beams, said beams being focused on a slot (F) connected to the object to be positioned (OBJ), the larger side of the slot (F) being perpendicular to the positioning direction, and a photodiode (13) adapted for collecting the beams from the slot (F) and associated with a synchronous detection amplifier (9) for supplying a signal indicative of the slot (F) position relative to the reference position.