| 摘要 |
A sensor (10) preferably capable of high resolution sensing over a large operating range includes a composite diaphragm (12) containing nanotubes or nanowires (14). The nanotubes or nanowires (14) preferably form a mat that is embedded in insulating material (16, 18), such as high dielectric or insulating thin films. The nanotubes or nanowires (14) may provide the diaphragm (10) with a Young's modulus of greater than about 1000 GPa and a tensile strength of greater than about 100 GPa. The strain in the nanotubes or nanowires (14) may be measured by a change in resistance, voltage, current or capacitance. |
