发明名称 PHOTORESIST STRIPPING AGENT COMPOSITION
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a photoresist stripping agent composition which can peel the photoresist without corroding aluminum or aluminum alloy wiring and also Cu or Cu alloy wiring in a FPD manufacturing processes. <P>SOLUTION: This photoresist stripping agent composition containes 0.05-10 wt.% of at least one kind of heterocyclic compounds selected from groups of maltol, 2,6-dimethyl gamma pyron, 4-hydroxy-6-methyl-2-pyron, 4-hydroxy coumarin, 2,4-didydro xykinoline, 2-amino-4,6-dihydroxy pyrimidine, 2,4-diamino-6-hydroxy pyrimidine, 2-amino-4-hydroxy-6-methyl pyrimidine, 4,6-dimethyl-2-hydroxy pyrimidine, uracil, and 6-methyl uracil; 5-45 wt.% of first or second class alkanolamine or alkylamine; 30-94.85 wt.% of polar organic solvents, and 0.1-10 wt.% of sugar alcohols. <P>COPYRIGHT: (C)2009,JPO&INPIT</p>
申请公布号 JP2008286881(A) 申请公布日期 2008.11.27
申请号 JP20070129699 申请日期 2007.05.15
申请人 NAGASE CHEMTEX CORP 发明人 YAMABE TAKASHI;NISHIJIMA YOSHITAKA;YASUE HIDEKUNI
分类号 G03F7/42 主分类号 G03F7/42
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