发明名称 ULTRAVIOLET IRRADIATION DEVICE AND ULTRAVIOLET IRRADIATION METHOD
摘要 PROBLEM TO BE SOLVED: To adjust light volume of a plurality of wavelength bands individually and to adjust light intensity distribution of irradiating light arbitrarily. SOLUTION: A lamp unit 30 is constituted by including a light source 1 supplying the irradiating light, a first reflecting mirror group 2A and a second reflecting mirror group 3A. The light emitted from the lamp unit 30 is irradiated on an object 12 to be irradiated with light. The first reflecting mirror group 2A and the second reflecting mirror group 3A are constituted by a plurality of separate reflecting mirrors 2a and 3a whose reflection angles and positions can be individually adjusted. The separate reflecting mirrors 3a constituting the second reflecting mirror group 3A reflects the irradiating light of the wavelength band of visible-infrared ray, and transmits the light of the other wavelength band. The separate reflecting mirrors 2a constituting the first reflecting mirror group 2A reflects the irradiating light of the wavelength band of ultraviolet ray, and transmits the light of the other wavelength band. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008288542(A) 申请公布日期 2008.11.27
申请号 JP20070190379 申请日期 2007.07.23
申请人 NEC CORP 发明人 YAMAGATA SHINJI;NAKA HIROSHI
分类号 H01L21/027 主分类号 H01L21/027
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