| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device, more easily, quickly and efficiently performing non-contact vibration measurement of an object and simultaneously improving the accuracy of vibration measurement for the objetc. SOLUTION: At least one laser interferometer 6a, 6b, 6c mounted on a holder 5 is moved to a measurement position M1 for measuring the measuring point 9 on an object 8, vibration data is calculated from measurement beams 7a, 7b, 7c from the laser interferometer toward a measuring point on the object and the measurement beams scattered and reflected from the object, and the vibration data is evaluated and output as the vibration data evaluating the measurement point. Calibration for the position of the laser interferometer using the at least one optional preset known measuring point on the object is performed at least once, and the conversion relationship for calculating the relative positions of the laser interferometer to the object in optional measuring positions M1, M2 is created based on the above calibration. COPYRIGHT: (C)2009,JPO&INPIT
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