| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a fan filter unit capable of easily acquiring a blowout air current of less temperature difference between the suction temperature and the blowout temperature. <P>SOLUTION: A fan unit 4 is incorporated into a box-shaped chamber 5, and a filter 9 is arranged on the blowout side of the fan unit 4, and a Peltier element 6 is arranged on an inner surface or an outside surface of a side surface of the chamber 5. The Peltier element 6 is arranged so that the inside of the chamber 5 becomes a heat absorption surface and the outside becomes an exhaust heat surface, and the fan filter unit is easily provided for acquiring the blowout air current of less temperature difference between the suction temperature and the blowout temperature. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
