| 摘要 |
PROBLEM TO BE SOLVED: To provide a material supply apparatus which improves efficiency of material supply when carrying out additional charge or recharge in a single crystal growing method based on a Czochralski method. SOLUTION: The material supply apparatus comprises: a cylindrical material supply conduit 11 filled with granular solid material 12, extending vertically on a crucible 3 and having a lower end part whose inner diameter is tapered toward the lower side; a conical bottom lid 14 attached detachably to the lower end of the material supply conduit 11; a metal shaft 15 going through the inside of the material supply conduit 11 while being covered with a protection tube 16 and connected to the bottom lid 14 for lowering the bottom lid 14 and for elevating the material supply conduit 11 and the bottom lid 14; a metal flange 18 for stopping lowering of the material supply conduit 11; and a drawing axis 8 hanging the material supply conduit 11 and the bottom lid 14 via the metal shaft 15 for lowering and elevating them. By lowering the bottom lid 14, the lower end of the material supply conduit 11 is opened and solid material 12 is dropped into material melt 13 within the crucible 3. COPYRIGHT: (C)2009,JPO&INPIT
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