| 摘要 |
A wafer carrier is to be provided which is capable of supporting semiconductor wafers with an appropriate load weight irrespective of the number loaded therein, and preventing the semiconductor wafers from being damaged due to an impact during transportation. An inner elastic mechanism that elastically supports an inner support member applies a greater load weight to front and back end portions of the inner support member, than to a central portion thereof. Accordingly, in the case where the wafer carrier is fully loaded with the semiconductor wafers, all the wafers are supported with a uniform and appropriate load weight. On the other hand, in the case where a fewer number of semiconductor wafers are to be loaded, for example placing the semiconductor wafers in a central region, where a smaller load weight is applied by the inner elastic mechanism to the inner support member, enables applying a uniform and appropriate load weight to all of the fewer number of semiconductor wafers.
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