| 摘要 |
A pressure sensor (10) comprises a first pressure chamber (12) containing fill fluid (14) at a first pressure, a second pressure chamber (13) containing fill fluid (14) at a second pressure, a porous dielectric diaphragm (11) having first and second major surfaces (15, 16) exposed to the first and second pressure chambers (12, 13), and first and second electrodes (19A, 19B, 20A, 20B) positioned with respect to the first and second major surfaces (15,16). A method for sensing pressure is also disclosed, comprising applying first and second pressures to fill fluid (14) in first and second pressure chambers (12, 13) of a pressure sensor (10) having a porous dielectric diaphragm (11), and producing an output representative of a pressure differential between the pressures, as a function of surface charges on first and second major surfaces (15, 16) of the porous dielectric diaphragm (11). |
