LEVITATION TRANSPORTATION DEVICE

摘要

A levitation transportation device that do not damage a workpiece and that can easily cope with a large-sized workpiece or a thin workpiece. A workpiece processing stage (300) is placed below a transportation surface of a transportation route along which a workpiece is levitated and transported by pressurized gas jetted in a predetermined direction. Above the workpiece processing stage (300) is placed a slide jet table (403) forming a part of the transportation route in an advanceable and retreatable manner. Further, the stage (300) has a jet section for jetting the pressurized gas upward from a gap in the jet table (403). When a workpiece is levitated and transported to above the stage (300), the jet table (403) located above the stage (300) receives the workpiece while causing it to levitate, retreats from above the stage (300), and delivers the workpiece to the stage (300) by operation of the jet section. When processing by the stage (300) is completed, the workpiece is levitated to a position above the transportation surface by operation of the jet section. After that, the jet table (403) receives the workpiece while causing it to levitate and then delivers it to the transportation route.