| 摘要 |
A gas sensor includes a substrate having a low thermal conductivity. Loca lized heating can be produced using a serpentined heater carried by the subs trate. The low thermal conductivity of the substrate substantially confines the generated heat to a region local to the heater thereby reducing required power to operate the sensor. Multiple sensing elements can be deposited ont o the substrate adjacent to respective heaters and relatively close together because of the thermal isolation provided by the substrate. In one embodime nt, the sensor can include the ceramic substrate, the heater, catalytic mate rial overlying the heater with a gas impermeable layer overlying, at least i n part the catalytic material.
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