EXPOSURE DEVICE, EXPOSURE METHOD, AND METHOD FOR MANUFACTURING PANEL SUBSTRATE FOR DISPLAY

摘要

PROBLEM TO BE SOLVED: To uniform the illuminance distribution of exposure light rays by using a plurality of lamps for a light source that generates exposure light rays.

SOLUTION: A plurality of lamps 31 are used for the light source that generates exposure light rays. The light rays generating from the lamps 31 are condensed, and a substrate 1 is exposured with the exposure light rays composed of the light rays from the plurality of lamps 31. A light source controller 50 determines a target value of the illuminance of the lamp based on a target value of the illuminance of the exposure light. Each illuminance sensor 42 detects the illuminance of each lamp 31. A power supply controller 40 carries out a feedback control on each power supply 41 to render a detection result of each illuminance sensor 42 into the determined target value of the illuminance of the lamp. An illuminance sensor 52 detects the illuminance of the exposure light rays. The light source controller 50 corrects the target value of the illuminance of the lamp based on the detection result by the illuminance sensor 52. The power supply controller 40 carries out a feedback control on each power supply 41 to render the detection result of each illuminance sensor 42 into the corrected target value of the illuminance of the lamp.

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