| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a three-dimensional photonic crystal by which a sacrificial layer can be made flat and deformation of a rod due to a thermal bonding is reduced. SOLUTION: The method of manufacturing the three-dimensional photonic crystal by a layered product having a periodic two-dimensional pattern structure includes: a first process in which a thin film composed of a first material is formed on a substrate (Fig. 1(a)); a second process in which a periodic two-dimensional pattern structure is formed on the thin film (Fig. 1(b)); a third process in which a thin film composed of a second material is formed on the two-dimensional pattern structure (Fig. 1(c)); a forth process in which when the thin film made of the second material is flattened, the flattening is stopped before the two-dimensional pattern structure of the ground is exposed (Fig. 1(d)); and a fifth process in which the first process through the fourth process are repeated at least twice to form the layered product having the two-dimensional pattern structure (Fig. 1(f), (g)). COPYRIGHT: (C)2009,JPO&INPIT |
