| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluorescent X-ray analysis apparatus capable of highly reliably detecting positional displacements of a sample 10. SOLUTION: The fluorescent X-ray analysis apparatus is provided with a stage 22 for mounting the sample 10, a measuring apparatus 2 having a casing for housing the stage 22 and provided with a cover which can be opened and closed to perform measurement by irradiating the sample 10 with X rays and detecting fluorescent X rays from the sample 10, an imaging device 3 for imaging the same part of the sample 10 and acquiring the first and second image data before and after the cover is closed after the sample 10 is mounted onto the stage 22 with the cover open, a positional displacement detection part 13 for detecting positional displacements of the sample 10 through the use of the first and second image data, and a reporting part 14 for reporting positional displacements. COPYRIGHT: (C)2009,JPO&INPIT
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