| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an excellent method and device for drilling a fine hole in glass with which the occurrence of notches in the peripheral edge of the hole can be suppressed. <P>SOLUTION: The surface of an object 1 composed of glass is covered with a protection layer 4, and then an opening 40 for drilling is formed at a part of the protection layer 4, where the drilling is to be performed. An eluting solution 2 capable of eluting glass is jetted from a nozzle 3 and impinged against the surface of the object 1 at pressure of 5×10<SP>-2</SP>to 20×10<SP>-2</SP>N/cm<SP>2</SP>through the opening 40 for drilling. The eluting solution 2 jetted from the nozzle 3 is made into droplets each having a small diameter of 20-400μm that is smaller than that of the opening 40 for drilling. A through-hole 10 can be formed in the object 1 by continuing impingement with the solution 2. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
