| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitance type acceleration sensor of such a structure to hardly damage an electrode even when acceleration is applied to an excess. SOLUTION: The capacitance type acceleration sensor 301 includes: a base plate 11; support parts 15a, 15b formed on the base plate; movable electrodes 17a, 17b supported on the support parts while being floated from the base plate; and a fixed electrode 314 formed on the base plate, wherein either the movable electrode and the support parts, or the fixed electrode exists in a multiple. COPYRIGHT: (C)2009,JPO&INPIT
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