| 摘要 |
PROBLEM TO BE SOLVED: To suitably correct oblique position deviation in a substrate conveying direction of a flexible substrate relative to an opposed object. SOLUTION: The flexible substrate conveying device is provided with: a detection part for detecting position deviation of the flexible substrate 15 relative to the opposite object 16 arranged so as to be opposed to the flexible substrate 15; a correction mechanism for correcting position deviation of the flexible substrate 15 by inclining a rotation axis of a correction roller 11, i.e., at least one roller 10 relative to an axial direction in usual conveying when the position deviation of the flexible substrate 15 is detected by the detection part; and a friction force increase means for increasing the friction force between an outer peripheral surface of the correction roller 11 and a surface of the flexible substrate 15. COPYRIGHT: (C)2009,JPO&INPIT
|
