发明名称 Process For Manufacturing Micromechanical Devices Containing a Getter Material and Devices So Manufactured
摘要 A process is provided for manufacturing micromechanical devices formed by joining two parts together by direct bonding. One of the parts (12) is made of silicon and the other one is made of a material chosen between silicon and a semiconductor ceramic or oxidic material. The joint between the two parts forms a cavity (14) containing the functional elements of the device (11), possible auxiliary elements and a getter material deposit (13).
申请公布号 US2008293178(A1) 申请公布日期 2008.11.27
申请号 US20060094726 申请日期 2006.11.28
申请人 SAES GETTERS S.P.A. 发明人 RIZZI ENEA
分类号 B81C99/00;H01L21/00 主分类号 B81C99/00
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