发明名称 MEMORY CELL AND METHOD FOR MANUFACTURING THE SAME
摘要 The invention provides a memory cell. The memory cell is disposed on a substrate and comprises a plurality of isolation structures defining at least a fin structure in the substrate. Further, the surface of the fin structure is higher than the surface of the isolation structure. The memory cell comprises a doped region, a gate, a charge trapping structure and a source/drain region. The doped region is located in a top of the fin structure and near a surface of the top of the fin structure and the doped region has a first conductive type. The gate is disposed on the substrate and straddled the fin structure. The charge trapping structure is disposed between the gate and the fin structure. The source/drain region with a second conductive type is disposed in the fin structures exposed by the gate and the first conductive type is different from the second conductive type.
申请公布号 US2008290391(A1) 申请公布日期 2008.11.27
申请号 US20070958134 申请日期 2007.12.17
申请人 MACRONIX INTERNATIONAL CO., LTD. 发明人 HSU TZU-HSUAN;LUE HANG-TING
分类号 H01L21/8247;G11C11/34;H01L27/115 主分类号 H01L21/8247
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