发明名称 DICING APPARATUS AND DICING METHOD
摘要 <p>An UV tape (T), whose surface is coated with an ultraviolet curable adhesive, is separated by being irradiated with UV light emitted from an UV irradiation device (40, 40A, 40B) which comprises a plurality of LED lights (42) emitting UV light.</p>
申请公布号 WO2008142975(A1) 申请公布日期 2008.11.27
申请号 WO2008JP58335 申请日期 2008.05.01
申请人 ARAI, YUSUKE;TOKYO SEIMITSU CO., LTD. 发明人 ARAI, YUSUKE
分类号 H01L21/301;H01L21/683 主分类号 H01L21/301
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