| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To visualize a light intensity distribution created by transferring of an optical modulation element or a metal opening onto a substrate to be treated in a crystallization device. <P>SOLUTION: The crystallization device has: an irradiation system for ultraviolet light for pulsively irradiating the substrate to be treated with laser beams at an ultraviolet light region; and a visible light irradiation system successively irradiating the same irradiation region as that of the laser beams at the ultraviolet light region on the substrate to be treated with visible laser beams. In a region fused by uniformly applying laser beams at an ultraviolet light region, crystal growth is formed by the light intensity distribution of the visible laser beams. The crystallization device can visualize the laser beams for crystallization by combining fusing by pulsively applying laser beams at an ultraviolet light region with crystallization by successively applying visible laser beams. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
