发明名称 POLISHING PAD MANUFACTURING METHOD
摘要 <p>Provided is a polishing pad manufacturing method which eliminates slurry leakage and has excellent optical detection accuracy. The polishing pad manufacturing method includes a step of forming a groove for injecting a light transmissive region forming material on the polishing rear side of a polishing layer; a step of forming a light transmissive region by injecting the light transmissive region forming material into the groove and hardening the material; and a step of exposing the light transmissive region from a polishing front surface by buffing the polishing front side of the polishing layer.</p>
申请公布号 WO2008143029(A1) 申请公布日期 2008.11.27
申请号 WO2008JP58619 申请日期 2008.05.09
申请人 TOYO TIRE & RUBBER CO., LTD.;DOURA, MASATO;HIROSE, JUNJI;NAKAMURA, KENJI;FUKUDA, TAKESHI;SATO, AKINORI 发明人 DOURA, MASATO;HIROSE, JUNJI;NAKAMURA, KENJI;FUKUDA, TAKESHI;SATO, AKINORI
分类号 H01L21/304;B24B37/013;B24B37/20 主分类号 H01L21/304
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