| 发明名称 |
Laser Beam Conditioning System Comprising Multiple Optical Paths Allowing for Dose Control |
| 摘要 |
A radiation beam conditioning system comprising at least three optical paths in which the radiation is conditioned.
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| 申请公布号 |
US2008291417(A1) |
申请公布日期 |
2008.11.27 |
| 申请号 |
US20070753390 |
申请日期 |
2007.05.24 |
| 申请人 |
ASML NETHERLANDS B.V. |
发明人 |
VISSER HUIBERT;DE JAGER PIETER WILLEM HERMAN;VINK HENRI JOHANNES PETRUS;HENDRIKUS MEIJERINK MARCUS GERHARDUS |
| 分类号 |
G03B27/54;G21K5/04 |
主分类号 |
G03B27/54 |
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