| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical waveguide manufacturing method by which high adhesion is obtained between a cladding layer and a core layer and by which high process efficiency and productivity are obtained. SOLUTION: This method is characterized in that, a part of a core film material containing a first photoacid generator which has a first absorption maximum wavelength in an ultraviolet region, is irradiated with first ultraviolet light having a wavelength which contains the first absorption maximum wavelength, thereby producing a refractive index difference between the irradiation region and the non-irradiation region of the core film material to form the core layer; a clad film material containing a second photoacid generator which has a second absorption maximum wavelength different from the first absorption maximum wavelength is thermally clamped at least on one side of the core layer, thereby obtaining a layered product consisting of the core layer and the cladding layer; and the entire face of the layered product is irradiated with second ultraviolet light having a wavelength which contains the second absorption maximum wavelength but not the first absorption maximum wavelength, thereby improving adhesion between the core layer and the cladding layer. COPYRIGHT: (C)2009,JPO&INPIT |
