OPTICAL CHARACTERISTIC MEASURING DEVICE AND FOCUS ADJUSTING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an optical characteristic measuring device and a focus adjusting method capable of performing more easily focusing to a measuring object having relatively small density difference in a reflected image. SOLUTION: The light intensity (light quantity) of a beam section of observation light generated from a light source for observation is approximately uniform. The light intensity in a domain equivalent to a reticle image in the beam section becomes approximately zero by masking a part of the observation light by a mask part 26a. The observation light wherein a shadow domain equivalent to the reticle image is formed is reflected by a beam splitter 20 and irradiated to the measuring object OBJ. The focusing state of measuring light to the measuring object OBJ is determined based on the density difference (contrast) of the reflected image corresponding to the reticle image projected to the measuring object OBJ. COPYRIGHT: (C)2009,JPO&INPIT