| 摘要 |
PROBLEM TO BE SOLVED: To provide a fan filter unit without having temperature influence on clean air, by removing heating of a motor built in the fan filter unit. SOLUTION: This fan filter unit is provided by installing a filter 6 under a fan unit 4 by incorporating the fan unit 4 composed of a fan 2 and the motor 3 into a chamber 5. The fan filter unit is provided without having the temperature influence on the clean air 14, by cooling the motor 3 by exhausting cooling air (exhaust air) 13, by sending cooling air (supply air) 12 by a conduit 7, by connecting the conduit 7 for introducing the cooling air (the exhaust air) 13 outside to a port, by arranging the air exhaust port 10 in an opposed position, by connecting the conduit 7 for introducing the cooling air (the supply air) 12 from the outside to a port, by arranging the air supply port 9 in a cooling cover 8, by covering the whole motor 3 with the cooling cover 8. COPYRIGHT: (C)2009,JPO&INPIT
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