发明名称 OPTICAL ELEMENT HOLDING APPARATUS, BARREL, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
摘要 An optical element holding apparatus includes an aluminum buffer member accommodated in a stainless steel frame body and having a linear expansion coefficient differing from that of the frame body. The buffer member contacts a first member of a rotation link block. The frame body includes slits defining the rotation link block, a second connection block, a first connection block, and a displacement block. Drive force generated by expansion of the buffer member when the temperature changes is amplified by the rotation link block, the second connection block, the first connection block, and the displacement block and transmitted to the support member to move the support member toward the lens.
申请公布号 US2008291555(A1) 申请公布日期 2008.11.27
申请号 US20080126621 申请日期 2008.05.23
申请人 OKADA TAKAYA 发明人 OKADA TAKAYA
分类号 G02B7/02 主分类号 G02B7/02
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