METHOD OF THE PRODUCTION OF CAVITIES IN A SILICON SHEET,申请号EP20030799651-传众专利搜索

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发明名称	METHOD OF THE PRODUCTION OF CAVITIES IN A SILICON SHEET
摘要
申请公布号	EP1573802(B1)	申请公布日期	2008.11.26
申请号	EP20030799651	申请日期	2003.12.19
申请人	S.O.I. TEC SILICON ON INSULATOR TECHNOLOGIES	发明人	SCHWARZENBACH, WALTER;MALEVILLE, CHRISTOPHE
分类号	H01L21/762;B81C1/00;H01L21/265;H01L21/266;H01L21/311;H01L21/764	主分类号	H01L21/762
代理机构		代理人
主权项
地址

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