SILICON WAFER AND PROCESS FOR PRODUCING THE SAME,申请号EP20050806093-传众专利搜索

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发明名称	SILICON WAFER AND PROCESS FOR PRODUCING THE SAME
摘要
申请公布号	EP1909315(A4)	申请公布日期	2008.11.26
申请号	EP20050806093	申请日期	2005.11.09
申请人	SUMCO CORPORATION	发明人	SUGIMURA, WATARU;ONO, TOSHIAKI;HOURAI, MASATAKA
分类号	H01L21/322;C30B29/06;C30B33/02;H01L21/26;H01L21/324	主分类号	H01L21/322
代理机构		代理人
主权项
地址

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