Solvents and methods using same for removing silicon-containing residues from a substrate,申请号EP20050004357-传众专利搜索

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发明名称	Solvents and methods using same for removing silicon-containing residues from a substrate
摘要
申请公布号	EP1583141(A3)	申请公布日期	2008.11.26
申请号	EP20050004357	申请日期	2005.02.28
申请人	AIR PRODUCTS AND CHEMICALS, INC.	发明人	WEIGEL, SCOTT JEFFREY;KHOT, SHRIKANT NARENDRA;MORRIS-OSKANIAN, ROSALEEN PATRICIA;MAYORGA, STEVEN GERARD;MACDOUGALL, JAMES EDWARD;SENECAL, LEE
分类号	H01L21/3213;H01L21/306;H01L21/31;B05D3/00	主分类号	H01L21/3213
代理机构		代理人
主权项
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