发明名称 NEGATIVE-TYPE PHOTOSENSITIVE FLUORINATED AROMATIC RESIN COMPOSITION
摘要 To provide a negative photosensitive fluorinated aromatic resin composition having a low relative permittivity, low water absorptivity, high heat resistance and high productivity. A negative photosensitive fluorinated aromatic resin composition comprising the following fluorinated aromatic prepolymer, a photosensitizer and a solvent. Here the fluorinated aromatic prepolymer is a fluorinated aromatic prepolymer which is obtained by subjecting either one or both of a compound (Y-1) having a crosslinkable functional group (A) and a phenolic hydroxyl group, and a compound (Y-2) having a crosslinkable functional group (A) and a fluorinated aromatic ring, to a condensation reaction in the presence of a HF-removing agent, with a fluorinated aromatic compound (B) represented by the following formula (1) : (wherein n is an integer of from 0 to 3, each of a and b which are independent of each other, is an integer of from 0 to 3, each of Rf 1 and Rf 2 is a fluorinated alkyl group having at most 8 carbon atoms, and F in the aromatic ring represents that hydrogen atoms of the aromatic ring are all substituted by fluorine atoms), and a compound (C) having at least 3 phenolic hydroxyl groups, and which has crosslinkable functional groups (A) and ether bonds and has a number average molecular weight of from 1×10 3 to 5×10 5 .
申请公布号 EP1995635(A1) 申请公布日期 2008.11.26
申请号 EP20070738738 申请日期 2007.03.15
申请人 ASAHI GLASS COMPANY, LIMITED 发明人 ERIGUCHI, TAKESHI;YAMAMOTO, HIROMASA;TSURUOKA, KAORI
分类号 G03F7/027;G03F7/004;H01L21/027 主分类号 G03F7/027
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