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发明名称
Ionenquelle der Elektronenbeschussbauart
摘要
申请公布号
DE1648922(A1)
申请公布日期
1971.06.09
申请号
DE19671648922
申请日期
1967.08.17
申请人
HITACHI LTD.
发明人
TSUYAMA,HITOSHI;HIROSE,HIROSHI;KIMURA,HIROKAZU
分类号
H01J49/14
主分类号
H01J49/14
代理机构
代理人
主权项
地址
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