Probe Module, Probe Array, and a Method of Assembling Probe Arrays

摘要

The invention refers to a probe array, e.g. for scanning probe microscopes, which is assembled from individual probe modules. Such a probe module comprises a spring means (cantilever) and/or an actuator and handling means and is reversibly attached to a platform carrying the array. In a preferred embodiment the array is assembled out of individual probe modules, which may individually be replaced with identical or different probe modules.